Wafer carrier with wafer retaining cushions

Details Wafer carrier with wafer retaining cushions Wafer carrier with wafer retaining cushions

1992-02-26

1993-10-26

Gibson, Jr., Robert W.

Supports: racks

Special article

Platelike

206334, 206454, B65D 8548, H77F 700

Patent

active

052557979

ABSTRACT:
A wafer carrier for circular semiconductor wafers and having slotted sidewalls; cushioning fingers protruding upwardly and obliquely inwardly through the slots in the sidewalls and engaging the wafers and directing pressure against the wafers in a slightly downwardly direction, toward the center of the wafer and toward the lower portion of the sidewall across from the finger applying pressure; the fingers located immediately adjacent above the horizontal centerline of the wafer; and a latch is provided for retaining the fingers against the wafers, but permitting the fingers to be swung outwardly through the slotted sidewalls for releasing the wafers during removal and insertion of the wafers.

REFERENCES:
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patent: 5025926 (1991-06-01), Gregerson et al.

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