Wafer carrier, wafer conveying system, stocker, and method...

Details Wafer carrier, wafer conveying system, stocker, and method... Wafer carrier, wafer conveying system, stocker, and method...

2006-07-18

2006-07-18

Douglas, Steven O. (Department: 3751)

Fluent material handling, with receiver or receiver coacting mea

Evacuation apparatus

With filling with gas

C141S098000, C414S937000, C414S939000

Reexamination Certificate

active

07077173

ABSTRACT:
When atmosphere inside a wafer carrier is replaced by introducing a gas into the wafer carrier from a gas inlet provided to the wafer carrier that can accommodate wafers. At the same time, the atmosphere inside the wafer carrier is sucked to make an inside pressure negative relative to an outside pressure.

REFERENCES:
patent: 5217053 (1993-06-01), Foster et al.
patent: 6092980 (2000-07-01), Kumasaka et al.
patent: 5-326679 (1992-05-01), None
patent: 04-294766 (1992-10-01), None
patent: 11-168135 (1999-06-01), None
patent: 11-307623 (1999-11-01), None

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