Wafer carrier mapping sensor assembly

Details Wafer carrier mapping sensor assembly Wafer carrier mapping sensor assembly

2005-05-24

2005-05-24

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559330, C414S936000

Reexamination Certificate

active

06897463

ABSTRACT:
A wafer mapping sensor assembly includes a housing, and an imaging array positioned therein. Imaging optics are positioned relative to the array to focus an image upon the array. An illumination source is configured to direct illumination toward the wafer, where such illumination is reflected by the wafer. An optical element is interposed between the source and the wafer. The optical element directs the illumination to reduce the effects of undesirable illumination.

REFERENCES:
patent: 5504345 (1996-04-01), Bartunek et al.
patent: 6188323 (2001-02-01), Rosenquist et al.
patent: 6291830 (2001-09-01), Duquette
patent: 20030141465 (2003-07-01), Schuda
patent: 2664525 (1992-01-01), None
U.S. Appl. No. 10/190,898, filed Jul. 8, 2002, Cole et al.

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