Wafer carrier holder for wafer carriers

Details Wafer carrier holder for wafer carriers Wafer carrier holder for wafer carriers

1989-11-20

1992-03-31

Cherry, Johnny D.

Handling: hand and hoist-line implements

Contact lens applicator

294 271, 294 871, 294159, B65D 7100

Patent

active

051001900

ABSTRACT:
Low profile self-draining wafer carrier holder for gripping and carriage of semiconductor wafer carriers through robotically, automated or manual processing equipment. Opposing members extend horizontally from a central base with gripping fingers at outer extremities to grip wafer carriers for automatic processing. A handle member extends vertically from the central base member, and includes a handle member for accommodation by robotic end effectors. Beveled and angled surfaces in a preferred one-piece construction aid in accelerated fluid chemical runoff.

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patent: 3830417 (1974-08-01), Montesi
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patent: 3939973 (1976-02-01), Wallestad
patent: 4195871 (1980-04-01), Chilton et al.
patent: 4520934 (1985-06-01), Aigo
patent: 4735313 (1988-04-01), Schoenberg
patent: 4762353 (1988-08-01), Molinaro

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