Wafer carrier holder for wafer carriers

Details Wafer carrier holder for wafer carriers Wafer carrier holder for wafer carriers

1990-06-04

1992-09-22

Cherry, Johnny D.

Handling: hand and hoist-line implements

Contact lens applicator

118500, 294 871, 294159, B65D 7100

Patent

active

051491583

ABSTRACT:
Low profile self-draining wafer carrier holder for gripping and carriage of semiconductor wafer carriers through robotically, automated or manual processing equipment. Opposing members extend horizontally from a central base with gripping fingers at outer extremities to grip wafer carriers for automatic processing. A handle member extends vertically from the central base member, and includes a handle member for accommodation by robotic end effectors. Beveled and angled surfaces in a preferred one-piece construction aid in accelerated fluid chemical runoff. An alternative embodiment includes a high temperature wafer carrier holder with a sloped handle and internal quartz structural rods to prevent warping of the holder.

REFERENCES:
patent: 2312256 (1943-02-01), Lumley
patent: 3923191 (1975-12-01), Johnson
patent: 3939973 (1976-02-01), Wallestad
patent: 4195871 (1980-04-01), Chilton et al.
patent: 4572101 (1986-02-01), Lee
patent: 4762353 (1988-08-01), Molinaro
patent: 4872554 (1989-10-01), Quernemoen

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