Wafer carrier having both a rigid structure and resistance to co

Details Wafer carrier having both a rigid structure and resistance to co Wafer carrier having both a rigid structure and resistance to co

1996-05-17

1998-08-04

Kramer, Dean

Handling: hand and hoist-line implements

Article carrier gripped and carried by hand

Having plural discrete receivers or supports for spaced...

118500, 118728, 206710, 211 41, B65D 8586

Patent

active

057883041

ABSTRACT:
A wafer carrier for use in the transportation and storage of semiconductor wafers. More particularly, the invention is a wafer carrier having both a rigid structure and a corrosion resistant coating. The wafer carrier includes a unitary frame having several wafer supports joined by connecting members. The frame is coated with a material, such as a fluoropolymer, which is resistant to corrosive materials typically used in semiconductor fabrication processes.

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