Wafer carrier and semiconductor apparatus for processing a semic

Details Wafer carrier and semiconductor apparatus for processing a semic Wafer carrier and semiconductor apparatus for processing a semic

1998-02-02

2000-02-22

Gravini, Stephen

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

34228, 34229, F26B 2106

Patent

active

060265892

ABSTRACT:
A wafer carrier is provided comprised of a circular plate having a flat edge region extending around the circumference of the plate. The plate has a circular recessed center region with a recessed bottom surface and includes an upwardly inclined surface around the periphery of the recessed bottom surface. A substrate is placed in the center region where it is supported by a portion of the upwardly inclined surface and is spaced apart form the recessed bottom surface such that the substrate is supported only around its edge. The wafer carrier minimizes surface contact with the substrate thereby minimizing metal contamination and surface damage to the backside of a substrate and prevents deposition on the backside of the substrate.

REFERENCES:
patent: 4907931 (1990-03-01), Mallory et al.
patent: 5314509 (1994-05-01), Kato et al.
patent: 5349762 (1994-09-01), Kato et al.
patent: 5369891 (1994-12-01), Kamikawa
patent: 5457896 (1995-10-01), Kato et al.
patent: 5553396 (1996-09-01), Kato et al.
patent: 5556147 (1996-09-01), Somekh et al.
patent: 5643366 (1997-07-01), Somekh et al.
patent: 5645646 (1997-07-01), Beinglass et al.
patent: 5656093 (1997-08-01), Burkhart et al.
patent: 5657553 (1997-08-01), Tarui et al.
patent: 5661913 (1997-09-01), Kato et al.
patent: 5667592 (1997-09-01), Boitnott et al.
patent: 5784799 (1998-07-01), Kato et al.
patent: 5863170 (1999-01-01), Boitnott et al.

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