Wafer carrier

Details Wafer carrier Wafer carrier

1996-01-11

1998-07-14

Nold, Charles

Stock material or miscellaneous articles

Hollow or container type article

Polymer or resin containing

428 341, 428303, 428367, 428922, 206454, B65D 8530

Patent

active

057801274

ABSTRACT:
A dimensionally stable and static dissipative carrier for semiconductor wafers or magnetic storage disks that has exceptionally low particle generation characteristics. The carrier having opposing side walls and connecting walls, the side walls having ribs defining slots for axial arrangement of the disks or wafers. The side walls, ribs, and end walls are all integral and formed of injection molded polybutyl terephtahalate (PBT) with sufficient carbon fiber filler for a surface resistivity less than 10.sup.12 ohms per square.

REFERENCES:
patent: 4669612 (1987-06-01), Mortensen

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