Work holders – With fluid means – Vacuum-type holding means
Patent
1991-05-17
1993-03-23
Watson, Robert C.
Work holders
With fluid means
Vacuum-type holding means
269289R, B23P 1700
Patent
active
051957299
ABSTRACT:
A carrier for a semiconductor wafer or other substrate has an outer portion adapted for engagement by equipment for processing wafers. Interior to the outer portion a substantially planar supporting surface is provided. A retaining lip is provided above the plane in which the supporting surface lies by at least the height of a wafer of a selected size. The circumference of the retaining lip is of sufficient size and proper shape to permit the passage of a wafer of the selected size. The carrier is undercut under the lip, whereby a wafer of the selected size, when placed on the supporting surface, may be retained.
In one embodiment, the carrier has a cylindrical shape. The top of the carrier includes a flat outer ring-like surface. The supporting surface and the circumference of the retaining lip are both circular.
REFERENCES:
patent: 2893163 (1959-07-01), Hazel
patent: 2929601 (1960-03-01), Anderson
patent: 2963256 (1960-12-01), Borah
patent: 3393892 (1968-07-01), Buck
patent: 4436356 (1984-03-01), Stelling
patent: 4644639 (1987-02-01), Atteberry
patent: 4744550 (1988-05-01), Oglesbee
patent: 4970772 (1990-11-01), Steere
patent: 4993895 (1991-02-01), Nordstrom
Sekigahama Satoshi
Thomas Michael E.
von Salza Brown Richard
Murray William H.
National Semiconductor Corporation
Rappaport Irving S.
Robinson Stephen R.
Watson Robert C.
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