Wafer carrier

Details Wafer carrier Wafer carrier

1997-10-15

1999-10-05

Foster, Jim

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

53473, 206454, 206832, 211 4118, B65D 8590

Patent

active

059609605

ABSTRACT:
A wafer carrier includes a housing having an interior chamber which has a plurality of rows of grooves having a predetermined spacing formed thereon such that a plurality of wafers can be stored into the grooves of each row, respectively. The wafer carrier further includes a plurality of rows of movable elastic pieces provided around the interior chamber. The movable elastic pieces of each row corresponds to the grooves of each row formed on the interior chamber, respectively, and each movable elastic piece of each row is movable along a direction of the row between a first position of a corresponding groove and a second position between the corresponding groove and an adjacent groove.

REFERENCES:
patent: 4043451 (1977-08-01), Johnson
patent: 4176751 (1979-12-01), Gillissie
patent: 4858764 (1989-08-01), Domokos
patent: 4872554 (1989-10-01), Quernemoen
patent: 4993559 (1991-02-01), Cota
patent: 5025924 (1991-06-01), Watnabe
patent: 5255797 (1993-10-01), Kos
patent: 5370142 (1994-12-01), Nishi et al.
patent: 5452795 (1995-09-01), Gallagher et al.
patent: 5586658 (1996-12-01), Nyseth

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