Wafer carrier

Details Wafer carrier Wafer carrier

1989-07-31

1991-02-19

Johnson, Blair M.

Supports: racks

Special article

Platelike

432253, A47G 1908

Patent

active

049935593

ABSTRACT:
An improved carrier for holding semiconductor wafers at a predetermined angle during processing is described having side rails with slots for holding lateral edges of the wafer and bottom slots having a curved floor for supporting the wafer edge without substantially contacting the corners of the wafer where the wafer edge and principal wafer surfaces join. This reduces yield loss due to wafer edge chipping. The side slots are desirably off-set from corresponding bottom slots so that the wafers will be consistently oriented at the predetermined angle and have uniform spacing.

REFERENCES:
patent: 4318749 (1982-03-01), Mayer
patent: 4653636 (1987-03-01), Armstrong

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