Wafer carrier

Coating apparatus – Work holders – or handling devices

Patent

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Details

118320, 211 40, 211 41, 206454, 206328, 134137, B05C 1302

Patent

active

044717164

ABSTRACT:
A PFA Teflon carrier for silicon wafers being processed in hot baths in the production of integrated circuit chips with sidewalls having wafer spacing webs and grooves receiving the wafers in confronting and spaced relation. The sidewalls having outboard channel supports or stiffening bars extending substantially to the ends of the sidewalls and adjacent offsets in the sidewalls which connect to the end walls of the receptacle, one end wall being H-shaped and having a cross bar panel with elongate parallel stiffener bars thereon at the level of the bottom edge of the wafer confining panels in the sidewalls, the stiffener bars in the end walls having their ends spaced from the sidewalls.

REFERENCES:
patent: 3923156 (1975-12-01), Wallestad
patent: 3961877 (1976-06-01), Johnson

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