Wafer carrier

Details Wafer carrier Wafer carrier

1982-08-20

1984-09-18

Smith, John D.

Coating apparatus

Work holders, or handling devices

118320, 211 40, 211 41, 206454, 206328, 134137, B05C 1302

Patent

active

044717164

ABSTRACT:
A PFA Teflon carrier for silicon wafers being processed in hot baths in the production of integrated circuit chips with sidewalls having wafer spacing webs and grooves receiving the wafers in confronting and spaced relation. The sidewalls having outboard channel supports or stiffening bars extending substantially to the ends of the sidewalls and adjacent offsets in the sidewalls which connect to the end walls of the receptacle, one end wall being H-shaped and having a cross bar panel with elongate parallel stiffener bars thereon at the level of the bottom edge of the wafer confining panels in the sidewalls, the stiffener bars in the end walls having their ends spaced from the sidewalls.

REFERENCES:
patent: 3923156 (1975-12-01), Wallestad
patent: 3961877 (1976-06-01), Johnson

Affiliated with

Also associated with

Rating

Wafer carrier does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer carrier, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer carrier will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-788615