Wafer bonding material with embedded conductive particles

Details Wafer bonding material with embedded conductive particles Wafer bonding material with embedded conductive particles

2011-07-05

2011-07-05

Shewareged, Betelhem (Department: 1785)

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

C428S620000, C156S379900, C252S500000, C252S520300, C252S521200, C430S200000

Reexamination Certificate

active

07972683

ABSTRACT:
A material for bonding a first wafer to a second wafer, which includes an insulating adhesive with conductive particles embedded in the adhesive substance. When the adhesive is applied and melted or fused, and pressure is applied between the first wafer and the second wafer, the first wafer approaches the second wafer until a minimum separation is reached, defined by a dimension of the conductive particles. Each of the first wafer and the second wafer may have circuitry formed thereon, and the conductive particles may form a conductive path between the circuitry on one wafer and the circuitry on the other wafer. Advantageously, the high fusing temperature required by the insulating adhesive may also serve to activate a getter material, formed in the device cavity between the first wafer and the second wafer.

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