Wafer boat transfer tool

Details Wafer boat transfer tool Wafer boat transfer tool

1986-05-16

1988-03-01

Arola, Dave W.

Material or article handling

Elevator or hoist and loading or unloading means therefor

118500, 206334, 211 41, 432258, 432259, B65G 110

Patent

active

047282460

ABSTRACT:
A wafer boat transfer tool has an upper fork and a lower fork which may be differently configured for supporting wafer boats in different ways. The same tool may be used to transfer boats in one or more steps from locations where they are supported in one way to other locations where they are supported in the same or a different way. Also, the tool may be used to transfer more than one boat at a time without excessive travel in a direction parallel to the boat loader axis.
A versatile wafer designed for use with two different forks of the tool may be utilized with different boat loaders and a common wafer transfer machine and in-process storage nests.

REFERENCES:
patent: 2468326 (1949-04-01), Gleason
patent: 3187917 (1965-06-01), Miller
patent: 3998333 (1976-12-01), Kamada
patent: 4093201 (1978-06-01), Dietze et al.
patent: 4378189 (1983-03-01), Takeshita
patent: 4466381 (1984-08-01), Jenkins
patent: 4543059 (1985-09-01), Whang et al.
patent: 4572101 (1986-02-01), Lee

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