Wafer boat rotating apparatus

Details Wafer boat rotating apparatus Wafer boat rotating apparatus

1993-08-10

1994-10-18

Bucci, David A.

Material or article handling

Horizontally swinging load support

Swinging about pivot

414172, 414404, 414938, 414940, 901 30, B65G 6900

Patent

active

053562615

ABSTRACT:
A wafer boat rotating apparatus is disclosed, which includes a boat holding portion for holding both ends of the wafer boat, a vertical rotation drive mechanism for rotating the boat holding portion on a vertical plane, and a horizontal rotation drive mechanism for rotating the boat holding portion on a horizontal plane. A wafer holding member is disposed on the boat holding portion and adapted to keep the wafers held in the wafer boat apart from a bottom portion of the wafer boat by a small distance. Thus, compensation for the difference of coefficients of thermal expansion between the wafers and wafer boat during heat treatment can be made easily.

REFERENCES:
patent: 5028195 (1991-07-01), Ishii et al.
patent: 5123804 (1992-06-01), Ishii et al.
patent: 5131799 (1992-07-01), Nishi et al.
patent: 5163832 (1992-11-01), Ishii et al.
patent: 5178639 (1993-01-01), Nishi
patent: 5180273 (1993-01-01), Sakaya et al.

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