Wafer-boat positioning member of wafer container

Details Wafer-boat positioning member of wafer container Wafer-boat positioning member of wafer container

1997-07-16

1998-08-25

Davis, Antoine Duval

Machines not elsewhere specified

Heat treatment, welding or brazing

Scientific, laboratory, or industrial heating equipment

1509

Patent

active

D03973468

REFERENCES:
patent: 5538390 (1996-07-01), Salzman
patent: 5586585 (1996-12-01), Bonora et al.
patent: 5630690 (1997-05-01), Salzman

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