Wafer boat or rack

Details Wafer boat or rack Wafer boat or rack

1993-09-29

1996-02-06

Douglas, Alan P.

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

D 6407, D 6629

Patent

active

D03668681

REFERENCES:
patent: D291413 (1987-08-01), Uehara et al.
patent: 4355974 (1982-10-01), Lee
patent: 4515104 (1985-05-01), Lee
patent: 4572101 (1986-02-01), Lee

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