Wafer-boat for heat-processing of semiconductor wafers

Details Wafer-boat for heat-processing of semiconductor wafers Wafer-boat for heat-processing of semiconductor wafers

2007-09-25

2007-09-25

Sikder, Selina (Department: 2912)

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

Design Patent

active

29236991

CLAIM:
The ornamental design for a wafer-boat for heat-processing of semiconductor wafers, as shown and described.

REFERENCES:
patent: 5219079 (1993-06-01), Nakamura
patent: D361752 (1995-08-01), Yamaga
patent: D404371 (1999-01-01), Shimazu
patent: D409158 (1999-05-01), Shimazu
patent: D411176 (1999-06-01), Shimazu
patent: 6065615 (2000-05-01), Uchiyama et al.
patent: D429224 (2000-08-01), Ishii
patent: 6488497 (2002-12-01), Buckley et al.
patent: 6796439 (2004-09-01), Araki
patent: 2002/0092815 (2002-07-01), Kim et al.
patent: 2003/0010730 (2003-01-01), Buckley
patent: 2003/0024888 (2003-02-01), Payne et al.
patent: 2005/0145584 (2005-07-01), Buckley et al.

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