Wafer boat

Details Wafer boat Wafer boat

2011-07-05

2011-07-05

Novosad, Jennifer E. (Department: 3637)

Supports: racks

Special article

Platelike

Reexamination Certificate

active

07971734

ABSTRACT:
Wafer boat for holding semiconductor wafers in a spaced vertical arrangement during processing, said wafer boat comprising a plurality of vertically spaced holding positions for receiving and supporting said wafers in a substantially horizontal orientation, wherein the holding positions can be accessed from a front side of the wafer boat to allow for insertion and removal of a wafer, wherein at least one holding position comprises a back support for engaging a back side portion of a wafer and two lateral supports for engaging opposite lateral side portions of the wafer, and wherein the back support is disposed at a lower position than said two lateral supports such that sagging of a front side portion of an inserted wafer near the front side of the wafer boat due to gravity is at least partially compensated for.

REFERENCES:
patent: 4355974 (1982-10-01), Lee
patent: 4640223 (1987-02-01), Dozier
patent: 4993559 (1991-02-01), Cota
patent: 5494524 (1996-02-01), Inaba et al.
patent: 5752609 (1998-05-01), Kato et al.
patent: 5788088 (1998-08-01), Kao
patent: 5931662 (1999-08-01), Adachi et al.
patent: 6287112 (2001-09-01), Van Voorst Vader et al.
patent: 2003/0121533 (2003-07-01), Bottos et al.
patent: 2004/0022607 (2004-02-01), Lim et al.
patent: 2005/0205502 (2005-09-01), Brown et al.
patent: 2006/0226094 (2006-10-01), Cho et al.
patent: 2009/0008346 (2009-01-01), Aihara et al.
patent: 2009/0175707 (2009-07-01), Bonora

Affiliated with

Also associated with

Rating

Wafer boat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer boat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer boat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2663170