Wafer boat

Details Wafer boat Wafer boat

1997-02-05

1998-05-19

Gibson, Jr., Robert W.

Supports: racks

Special article

Platelike

206454, 118500, A47F 700

Patent

active

057526095

ABSTRACT:
A wafer boat includes a plurality of rods arranged substantially parallel to each other at regular intervals. A plurality of ring members are attached to the rods at regular intervals in a longitudinal direction of the rods. A plurality of supporting pieces are attached to each of the ring members. Each of the supporting pieces extends upward from an upper surface portion of each of the ring members and is bent radially inward of the ring member. The supporting pieces of each of the ring members are brought into contact with an edge portions of a lower surface of the wafer to support the wafer. Further, a plurality of convex portions are formed at inner peripheral edge portions of each of the ring members between each pair of adjacent ones of the rods, and extend radially inward of the ring member.

REFERENCES:
patent: 4653636 (1987-03-01), Armstrong
patent: 4872554 (1989-10-01), Quernemoen
patent: 5219079 (1993-06-01), Nakamura
patent: 5492229 (1996-02-01), Tanaka et al.
patent: 5534074 (1996-07-01), Koons
patent: 5577621 (1996-11-01), Yi

Affiliated with

Also associated with

Rating

Wafer boat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer boat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer boat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1846147