Wafer-based planning methods and systems for batch-based...

Details Wafer-based planning methods and systems for batch-based... Wafer-based planning methods and systems for batch-based...

2007-04-17

2007-04-17

Von Buhr, M. N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

Reexamination Certificate

active

11288489

ABSTRACT:
Computer-implemented wafer-based planning methods for batch-based processing tools. Tool groups are appended in a tool group level of planning data provided by a MES for converting planning data from batch-based to wafer-based data. The planning data with appended tool group is applied to dispatch processing tools.

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