Wafer and method of making same

Details Wafer and method of making same Wafer and method of making same

1988-06-08

1989-07-11

Deboer, Todd E.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361414, 357 2, 357 6, H05K 114

Patent

active

048477320

ABSTRACT:
Disclosed is a wafer substrate for integrated circuits 1 which by itself may be made either of conductive or non-conductive material. This substrate carries two planes or layers of patterned metal 19,20, thus providing two principal levels of interconnection. A programmable amorphous silicon insulation layer 21 is placed between the metal layers. There are sheet lower metal layers with an insulator which permit power distribution across the wafer. Connections between the metal layers or between the metal layer and the substrate can be made through via holes in the insulator layers or layers, respectively. Pedestals are provided for bonding.

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