Material or article handling – Article reorienting device – Article support means rotates about a shiftable pivot point
Patent
1982-03-22
1984-07-03
Nase, Jeffrey V.
Material or article handling
Article reorienting device
Article support means rotates about a shiftable pivot point
198394, 198395, 414754, 414757, 414786, B65G 4724
Patent
active
044576641
ABSTRACT:
An automatic wafer alignment station is disclosed for aligning a wafer having flats about its centroid with the flats oriented in a preselected spatial direction. The wafer is held by a vacuum chuck which is operatively connected to a motor driven carriage for controlled movement about an X axis, to a .theta. actuator carried by the carriage for controlled rotation about the axis of the chuck, and to a Z actuator carried by the carriage for controlled motion about a Z axis. An X capacitive sensor and a Z capacitive sensor are positioned near the wafer. An X processing and Z compensating circuit is responsive to the X and the Z capacitive sensor output signals and provides an electrical signal that has values which exclusively represent the position of the edge of the wafer along the X axis only over a predetermined angular range. Circuit means including an A/D converter and a microprocessor respond to the electrical signal and produce a plurality of corrective signals to the X, Y, and .theta. actuators for aligning the wafer about its centroid and for orienting the flats of the wafer in a preselected spatial orientation.
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Abbe Robert C.
Judell Neil H.
Mallory Roy
Poduje Noel S.
ADE Corporation
Nase Jeffrey V.
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