Wafer alignment fixture for wafers having notches and/or flats

Details Wafer alignment fixture for wafers having notches and/or flats Wafer alignment fixture for wafers having notches and/or flats

1991-04-01

1993-04-27

Watson, Robert C.

Metal working

Means to assemble or disassemble

Means comprising hand manipulatable tool

269289MR, 269903, B23R 522

Patent

active

052050289

ABSTRACT:
The wafer alignment fixture is provided with a cassette support which can be slid between two positions on a base plate. In one position, the cassette support is aligned with a roller in order to align notched wafers with each other. In the second position, the cassette support is aligned with a second roller so as to effect alignment of wafers having flats.

REFERENCES:
patent: 2424090 (1947-07-01), Gordinier
patent: 2722867 (1955-11-01), Dackor et al.
patent: 2733330 (1956-01-01), Blewett
patent: 2781930 (1957-02-01), Menser et al.
patent: 3619158 (1971-11-01), Gogolya
patent: 4877228 (1989-10-01), Ripert
patent: 4970772 (1990-11-01), Steere

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