Wafer alignment fixture

Details Wafer alignment fixture Wafer alignment fixture

1989-12-05

1990-11-20

Watson, Robert C.

Metal working

Means to assemble or disassemble

Means comprising hand manipulatable tool

269287, 269903, B23B 522

Patent

active

049707728

ABSTRACT:
The wafer alignment fixture is provided with a pair of upstanding walls for mounting of a wafer cassette thereon as well as with a roller parallel to the walls to engage with the wafers of the cassette. Rotation of the roller causes the wafers in the cassette to rotate so as to move the notches of the wafers into alignment with the rollers. Upon coming into alignment with the roller, the wafers drop down onto a pair of support surfaces while being spaced from the roller so that further rotation is precluded. The roller may be tensioned in order to eliminate sag due to the weight of the wafers. Also, a second roller may be provided for rotating the aligned notches of the wafers into a different angular position within the cassette.

REFERENCES:
patent: 4306731 (1981-12-01), Shaw
IBM Technical Disclosure Bulletin, V. J. Delgado, "Semiconductor Wafer Alignment Fixture", vol. 10, No. 6, Nov. 1967, pp. 828-829.

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