Wafer alignment and transport mechanism

Details Wafer alignment and transport mechanism Wafer alignment and transport mechanism

1989-03-13

1990-01-09

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

With jarring means

414331, 414433, 414757, 414786, B65G 106

Patent

active

048924555

ABSTRACT:
A precise alignment mechanism combined with a transport mechanism for silicon wafers, that handles the wafers by the edges only, in order to eliminate the potential for surface damage or contamination of the wafers. The preferred embodiment of the invention works with wafers that are approximately prealigned in the cassettes before handling. A second embodimenmt can work with randomly aligned wafers. An improvement for high production or continuous operation adds a multiple cassette input to the invention.

REFERENCES:
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patent: 3820647 (1974-06-01), Waugh, Jr. et al.
patent: 4094426 (1978-06-01), Vogel
patent: 4213318 (1980-07-01), Priebe
patent: 4427332 (1984-01-01), Manriquez
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4621967 (1986-11-01), Masada
patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4662811 (1987-05-01), Hayden
patent: 4691817 (1987-09-01), Haar

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