Wafer alignment and positioning apparatus for chip testing by vo

Details Wafer alignment and positioning apparatus for chip testing by vo Wafer alignment and positioning apparatus for chip testing by vo

1986-12-29

1988-09-20

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158R, G01R 3102

Patent

active

047728469

ABSTRACT:
An apparatus for use in testing IC chips on a semiconductor wafer is disclosed that allows the wafer and an electrical probe to be independently positioned and then clamped together and moved as a single unit when they are in alignment. This permits a chip on a wafer to be supplied with power and tested electronically while any desired area of the chip can be positioned in the field of view of a scanning electron microscope for examination, such as with a voltage-contrast secondary-electron detector. Use of the disclosed apparatus will greatly facilitate and simplify the testing of unbonded chips on semiconductor wafers.

REFERENCES:
patent: 4212075 (1980-07-01), Cleversey et al.
patent: 4593820 (1986-06-01), Antonie et al.

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