Wafer aligning apparatus

Details Wafer aligning apparatus Wafer aligning apparatus

1994-06-28

1996-03-26

Huppert, Michael S.

Material or article handling

Device for emptying portable receptacle

With jarring means

414404, 414938, B65G 6502

Patent

active

055015689

ABSTRACT:
A wafer aligning apparatus for re-aligning a plurality of wafers at different pitches. The apparatus includes a plurality of wafer retaining plates, each of which retains a plurality of wafers, a guide device which guides the wafer retaining plates, and a transferring device which transfers the wafer retaining plates along the guide device, wherein when the plurality of wafer retaining plates are at one end of the guide device, they are spaced at a first pitch and aligned, and when the wafer retaining plates are at the other end of the guide device, they are aligned at a second pitch different from the first pitch.

REFERENCES:
patent: 4108323 (1978-08-01), Shambelan et al.
patent: 4573851 (1986-03-01), Butler
patent: 4597819 (1986-07-01), Kusuhara et al.
patent: 4695217 (1987-09-01), Lau
patent: 4856957 (1989-08-01), Lau et al.
patent: 4957406 (1990-09-01), Akagawa
patent: 4958982 (1990-09-01), Champet et al.
patent: 5007788 (1991-04-01), Asano et al.
patent: 5188499 (1993-02-01), Tarng et al.

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