Wafer air film transportation system

Details Wafer air film transportation system Wafer air film transportation system

1976-12-27

1978-03-28

Stoner, Jr., Bruce H.

Cutlery

302 31, B65G 5102

Patent

active

040812014

ABSTRACT:
The transportation of semiconductor wafers along a track on an air film. The supporting air film is controlled by the track configuration and fluid relationships to eliminate the need of a wafer guide on restraint to keep the wafers on the track.

REFERENCES:
patent: 3231165 (1966-01-01), Wallin et al.
patent: 3272415 (1966-09-01), Wallin
patent: 3385490 (1968-05-01), Malmgren et al.
patent: 3873013 (1975-03-01), Stibbe
patent: 3918706 (1975-11-01), Craft
patent: 3982328 (1976-09-01), Gustafsson et al.
IBM Technical Disclosure Bulletin, "Self-Centering Air Lift Transport," Apgar; D.H., and Ku; T.C., vol. 18, No. 7, Dec., 1975.

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