Wafer accounting and processing system

Details Wafer accounting and processing system Wafer accounting and processing system

1988-02-12

1989-08-22

Heyman, John S.

Communications: electrical

Condition responsive indicating system

Specific condition

377 8, 377 53, 340568, 269903, G08C 2100, G01B 1114

Patent

active

048599930

ABSTRACT:
According to the invention, each detecting element pair of a wafer detector is constituted by light-emitting and light-receiving elements of transmission-type and is arranged at a position corresponding to a fitting edge portion of one of a plurality of wafers. The number of detecting element pairs is equal to the number of wafers which can be stored in the wafer counter. Light emitted from a light-emitting element to a light-receiving element is kept substantially perpendicular to a surface of a wafer and is shielded when a wafer is engaged in a wafer counter. A change in the amount of light received by the light-receiving element is detected by a signal processor electrically connected to each of the detecting element pairs. The positions and number of a large number of wafers can be accurately and instantaneously detected with an extremely simple structure.

REFERENCES:
patent: 3665444 (1972-05-01), Scott
patent: 4513430 (1985-04-01), Vora et al.

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