Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2008-12-02
2010-10-19
McNeil, Jennifer C (Department: 1784)
Stock material or miscellaneous articles
Composite
Of silicon containing
C428S448000
Reexamination Certificate
active
07816013
ABSTRACT:
A wafer has a rare earth fluoride coating disposed, typically sprayed on a substrate as an outermost layer, the rare earth fluoride being selected from lanthanoid fluorides, yttrium fluoride, and scandium fluoride. It is useful as a dummy wafer in a plasma etching or deposition system.
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Hamaya Noriaki
Konya Masaru
Maeda Takao
Nakano Hajime
Tsukatani Toshihiko
Langman Jonathan C
McNeil Jennifer C
Shin-Etsu Chemical Co. , Ltd.
Westerman Hattori Daniels & Adrian LLP
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