Volumetric control of the flow of a filtering pump

Details Volumetric control of the flow of a filtering pump Volumetric control of the flow of a filtering pump

1998-04-30

2000-12-12

Freay, Charles G.

Pumps

Condition responsive control of pump drive motor

By controlling drive motor motive fluid

417 53, 417 63, F04B 4900

Patent

active

061589667

ABSTRACT:
The present invention relates to a pump of resin deposition on a semiconductive wafer including a pump body divided by a membrane of definition of a resin dispensation chamber and of a control chamber and an element of filtration of the resin before its dispensation to an outlet access of the pump body. The pump includes a control system for injecting the resin under constant pressure into the control chamber and aspiring the resin from the control chamber, and a capacitive presence sensor for detecting a first position of the membrane.

REFERENCES:
patent: 3836355 (1974-09-01), Lindskog et al.
patent: 3974825 (1976-08-01), Normann
patent: 5174472 (1992-12-01), Raque et al.
patent: 5201636 (1993-04-01), Mikulski
patent: 5249929 (1993-10-01), Miller, Jr. et al.
patent: 5249932 (1993-10-01), Van Bork
patent: 5252041 (1993-10-01), Schumack
patent: 5281107 (1994-01-01), De Koning

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