Voltage programmable links for integrated circuits

Details Voltage programmable links for integrated circuits Voltage programmable links for integrated circuits

1995-04-28

1997-06-24

Thomas, Tom

Semiconductor device manufacturing: process

Direct application of electrical current

To alter conductivity of fuse or antifuse element

438600, H01L 2182

Patent

active

056417039

ABSTRACT:
Methods and systems are discussed for fabricating electrically programmable link structures by fabricating a first metal conductor of a refractory conductive material, composite, or an aluminum alloy which has been modified with a refractory material, then fabricating an insulating link material over the first conductor, and subsequently, depositing a second conductor over the link material. In use, an electrical path can be formed between the first and second conductors by applying a voltage between such conductors across at least one selected region of the insulator, such that the insulating link material is transformed in the region and rendered conductive to form an electrical signal path.

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