Voltage monitoring apparatus in a semiconductor probe station

Details Voltage monitoring apparatus in a semiconductor probe station Voltage monitoring apparatus in a semiconductor probe station

2007-06-05

2007-06-05

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S114000

Reexamination Certificate

active

10933200

ABSTRACT:
An Electrical Die Sorting (EDS) process system for testing semiconductor chips comprises a probe station, a power supply unit configured in the probe station, and a voltage apparatus for measuring voltages of the power supply. The voltage apparatus comprises a measuring unit connected with voltage check terminals and a common ground terminal of the power supply unit, for measuring voltages between each of the voltage check terminals and the common ground terminal simultaneously; and a plurality of display units electrically connected with the measuring unit, for monitoring voltages of the respective voltage check terminals in real time.

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