Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Using radiant energy
Patent
1993-08-30
1995-08-22
Wieder, Kenneth A.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
Using radiant energy
324753, 435808, G01R 104
Patent
active
054443652
ABSTRACT:
A change in voltage can be sensitively detected at a local part of a measured object. A set of laser medium and E-O probe are disposed between a pair of mirrors, a first one and a second one, forming a laser resonator. A linearly polarized light is emitted from the laser medium. The polarized light enters the E-O probe, and returns after being reflected by the second mirror. When a voltage is given to the E-O probe from the measured object, depending on the voltage, a refractive index of the E-O probe is changed, the light emitted from the E-O probe is ovally polarized, and a resonance status of the laser resonator then varies. Therefore, the light intensity emitted through the partially penetrating first mirror to the outside of the laser resonator corresponds to the voltage at the measured object in the proximity of the E-O probe. Consequently, a voltage distribution on the measured object such as IC with fine structures can be two-dimensionally detected.
REFERENCES:
patent: 4446425 (1984-05-01), Valdmanis et al.
patent: 4910454 (1990-03-01), Williamson
patent: 5029273 (1991-07-01), Jaeger
patent: 5041779 (1991-08-01), Hales
Eisenstein et al, "High Quality Antireflection Coatings on Laser Facets by Sputtered Silicon Nitride", Applied Optics, vol. 23, No. 1, Jan. 1, 1984, pp. 161-164.
Valdmanis et al, "Subpicosecond Electrooptic Sampling: Principles and Applications", IEEE Journal of Quantum Electronics, vol. QE-22, No. 1, Jan. 1986, pp. 69-78.
Aoshima Shinichiro
Hirano Isuke
Takahashi Hironori
Urakami Tsuneyuki
Bowser Barry C.
Hamamatsu Photonics K.K.
Wieder Kenneth A.
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