Voltage measurement method using electron beam

Details Voltage measurement method using electron beam Voltage measurement method using electron beam

1990-09-11

1992-03-03

Wieder, Kenneth A.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, 324158D, G01R 0000

Patent

active

050936166

ABSTRACT:
An electron beam is irradiated on a sample to generate secondary electrons from the sample, the secondary electrons are detected by a secondary electron detector through a retarding grid to provide a secondary electron detector output signal, the relation is acquired in advance between a known sample voltage and a value (normalized secondary electron signal for the known sample voltage) resulting from dividing a differential value of the secondary electron detector output signal at a retarding grid voltage by the secondary electron detector output signal, and this relation is retrieved with a normalized secondary electron signal obtained with an unknown sample voltage to determine an absolute value of the unknown sample voltage.

REFERENCES:
patent: 4355232 (1982-10-01), Todokoro et al.
patent: 4514682 (1985-04-01), Feuerbaum
patent: 4554455 (1985-11-01), Todokoro et al.
patent: 4980639 (1990-12-01), Yoshizawa et al.
"Hitachi Review", vol. 65, No. 7, 1983, pp. 33-34.

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