Voltage controlled oscillator

Details Voltage controlled oscillator Voltage controlled oscillator

2007-05-01

2007-05-01

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S320000, C310S366000

Reexamination Certificate

active

10935264

ABSTRACT:
The present invention provides a voltage controlled oscillator comprising an thin film BAW resonator and a variable capacitor element. The thin film BAW resonator includes an anchor section formed on a Si substrate, a lower electrode supported on the anchor section and positioned to face the Si substrate, a first piezoelectric film formed on the lower electrode, and an upper electrode formed on the first piezoelectric film. On the other hand, the variable capacitor element includes a stationary electrode formed on a Si substrate, an anchor section formed on the Si substrate, a first electrode supported on the anchor section and positioned to face the Si substrate, a second piezoelectric film formed on the first electrode, and a second electrode formed on the second piezoelectric film.

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patent: 6924583 (2005-08-01), Lin et al.
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patent: 01/078230 (2001-10-01), None
A. P. S. Khanna et al., “A 2GHz Voltage Tunable FBAR Oscillator”, IEEE MTT-S Digest, Jul. 2003, pp. 717-720.

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