Voltage calibration in E-beam probe using optical flooding

Details Voltage calibration in E-beam probe using optical flooding Voltage calibration in E-beam probe using optical flooding

1985-05-31

1987-09-22

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, G01R 3128

Patent

active

046957944

ABSTRACT:
Method and apparatus for calibrating equipment used for testing photodiode arrays by reference to the diode under test. The diodes are illuminated with infrared radiation and different bias voltages, developed by bombardment with an electron beam, are measured at zero current. The measured voltage values are correlated with secondary emission sensor readouts to calibrate the sensor according to the specific diode being tested. Remote light emitting diodes generate the infrared radiation which is coupled to the photodiode array via optical fiber elements.

REFERENCES:
patent: 4415851 (1983-11-01), Langner et al.

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