Volatile organometallic compound containing a divalent metal and

Details Volatile organometallic compound containing a divalent metal and Volatile organometallic compound containing a divalent metal and

1998-08-11

1999-12-07

Nazario-Gonzalez, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

556 1, 556 27, 556181, 556182, 4272481, C07F 1900, C07F 506

Patent

active

059986441

ABSTRACT:
A novel organometallic compound of formula M[(.mu.-OR').sub.2 M'R.sub.2 ].sub.2 can be vaporized at a low temperature and advantageously employed in the CVD of a heterometallic oxide film of the MM'.sub.2 O.sub.4 type, wherein M is a divalent element such as Be, Mg, Zn or Cd; M' is a Group 13 element such as Al or Ga; and R and R' are each independently a C.sub.1-10, alkyl group, with the proviso that if M is Mg, M' is not Al.

REFERENCES:
patent: 5008420 (1991-04-01), Greco et al.

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