Volatile lanthanum complexes for use in chemical vapor depositio

Details Volatile lanthanum complexes for use in chemical vapor depositio Volatile lanthanum complexes for use in chemical vapor depositio

1989-10-13

1990-11-27

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

Metal coating

427252, C23C 1618

Patent

active

049734989

ABSTRACT:
Homoleptic bis (.pi.-arene) yttrium or lanthanide complexes of formula ML.sub.2, wherein M is yttrium or a lanthanide metal and the L ligands are di or trisubstituted benzene derivatives, are provided. Certain of the complexes are volatile and are therefore of interest in the chemical vapor deposition. A process for their manufacture is described.

REFERENCES:
patent: 4882206 (1989-11-01), Erbil

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