Volatile CVD precursors based on copper alkoxides and mixed Grou

Details Volatile CVD precursors based on copper alkoxides and mixed Grou Volatile CVD precursors based on copper alkoxides and mixed Grou

1992-01-31

1993-05-25

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

427250, 427252, 4272551, 4272552, 4272553, C23C 1600

Patent

active

052138445

ABSTRACT:
Fluorinated alkoxy compounds of copper, copper-calcium, copper-strontium, and copper-barium having the structure:

REFERENCES:
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patent: 4681959 (1987-07-01), Ayen et al.
patent: 4717584 (1988-01-01), Aoki et al.
Purdy et al., "New Alkoxides of Copper and the Alkaline and Alkaline-Earth etals Crystal Structure of Na.sub.2 Cu[OCH(CF.sub.3).sub.2 ].sub.4 ", Inorg. Chem., 30, 2812-2819.
Abbott et al., Inorg. Chem., 29, No. 3, 1990, 514.
Stafford et al., Can. J. Chem., 53, 1975, 817.
Loeb et al., Inorg. Chem., 18, No. 11, 1979, 3160.
Willis, C. J., Cood. Chem. Rev., 1988, 88, 133.

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