Organic compounds -- part of the class 532-570 series – Organic compounds – Unsubstituted hydrocarbyl chain between the ring and the -c-...
Patent
1990-06-05
1993-10-12
Ivy, C. Warren
Organic compounds -- part of the class 532-570 series
Organic compounds
Unsubstituted hydrocarbyl chain between the ring and the -c-...
540469, 549352, C07D22500, C07D32300
Patent
active
052527336
ABSTRACT:
Volatile .beta.-diketonate alkaline earth metal complexes useful in chemical vapor deposition (CVD) operations are formed using a cyclic ligand, such as a macrocyclic crown ether, to increase the degree of coordination and shielding around the individual metal ions in the diketonate structure. The resultant monomeric complexes readily volatize to give a chemically stable vapor.
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Norman John A. T.
Pez Guido P.
Air Products and Chemicals Inc.
Bongiorno Mary E.
Covington Raymond
Ivy C. Warren
Marsh William F.
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