Volatile copper(II) complexes for deposition of copper films...

Details Volatile copper(II) complexes for deposition of copper films... Volatile copper(II) complexes for deposition of copper films...

2005-09-06

2005-09-06

Meeks, Timothy (Department: 1762)

Coating processes

Coating by vapor, gas, or smoke

Metal coating

C427S229000

Reexamination Certificate

active

06939578

ABSTRACT:
The present invention relates to novel 1,3-diimine copper complexes and the use of 1,3-diimine copper complexes for the deposition of copper on substrates or in or on porous solids in an Atomic Layer Deposition process. This invention also provides a process for making amino-imines and novel amino-imines.

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McGeachin, Synthesis and properties of some β-diketimines derived from acetylacetone, and their metal complexes, Canadian Journal of Chemistry, vol. 48, 1903-1912, 1958.
N. A. Domnin et al., Zh. Organ. Khim, 1965, 1(1), pp. 658, Reactions of βDicarbonyl Compounds with Hydrazines.
M. Ritala and M. Leskela in “Atomic Layer Deposition” in Handbook of Thin Film Materials, H. S. Nalwa, Editor, Academic Press, San Diego, 2002, Vol. ume 1, Chapter 2.
S. G. McGeachin, “Synthesis and properties of some B-diketimines derived from acetylacetone, and their metal complexes”, Canadian Journal of Chemistry, Feb. 13, 1968, vol. 46, Alberta.

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