Volatile barium precursor and use of precursor in OMCVD process

Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing

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568382, C07F 300

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053191188

ABSTRACT:
Novel volatile barium complexes are disclosed which are very stable and evaporate cleanly at elevated temperatures. Such complexes are highly suited for use as a barium source in OMCVD processes.

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