Visual inspection apparatus

Details Visual inspection apparatus Visual inspection apparatus

2008-05-15

2010-06-15

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237100

Reexamination Certificate

active

07738091

ABSTRACT:
A visual inspection apparatus includes: a first substrate holding portion that holds a substrate so that a top surface is observable; a second substrate holding portion that holds the substrate so that a bottom surface is observable; a first substrate holding portion moving mechanism that moves the first substrate holding portion; a second substrate holding portion moving mechanism that moves the second substrate holding portion; and a control device that controls the first substrate holding portion moving mechanism and the second substrate holding portion moving mechanism so that the position of the substrate when observing the top surface of the substrate in the first substrate holding portion substantially matches the position of the substrate when observing the bottom surface of the substrate in the second substrate holding portion.

REFERENCES:
patent: 6606154 (2003-08-01), Oda
patent: 2006/0215152 (2006-09-01), Hashimoto
patent: 10-092887 (1998-04-01), None
patent: 2006-170622 (2006-06-01), None

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