Visual examination apparatus and visual examination method of se

Details Visual examination apparatus and visual examination method of se Visual examination apparatus and visual examination method of se

1998-05-22

2000-07-25

Font, Frank G.

Optics: measuring and testing

Inspection of flaws or impurities

3562401, 356364, G01N 2100, G01J 400

Patent

active

060942630

ABSTRACT:
A visual examination apparatus for a semiconductor device for optically reading an image of a semiconductor device having a substantially rectangular package is disclosed, comprising:

REFERENCES:
patent: 5298989 (1994-03-01), Tsukahara et al.
patent: 5838432 (1998-11-01), Tokuhashi et al.

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