Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2000-06-09
2004-11-09
Mehta, Bhavesh M. (Department: 2625)
Image analysis
Applications
Manufacturing or product inspection
C382S173000, C382S291000, C348S086000, C702S035000
Reexamination Certificate
active
06816609
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a vision measuring machine, such as a microscopic measuring device or a non-contact view measuring CMM, and in particular to measurement using a program (a part program).
2. Description of the Related Art
Conventionally, manually operating vision measuring machines and CNC (Computerized Numerical Control) vision measuring machines are used for inspection of ICs, read frames, IC packages, and so on. Generally, in measurement using a vision measuring machine, an object to be measured (workpiece), such as an IC, is placed on a stage, and photographed by an imaging means, such as a camera, so that an image thereof is displayed on a CRT. Subsequently, a part program for workpiece measurement is activated. A part program is a program prepared by storing information on a series of measurement procedures for one sample, taught by an operator, as well as information on the position and shape of the workpiece. When a part program is activated, commands are sequentially read from a prepared part program file. In response to a stage moving command, a driving means moves the stage. In response to a tool command, images of tools, such as a box tool, a circular tool, and so on, are added to a workpiece image displayed on the CRT. In this procedure, an edge point is detected using the provided tool, and a continuous edge is approximated from detected points using a least square method or the like. In response to an operation execution command, a designated operation, such as a line width operation, a circle center operation, a circle radius operation, and so on, is executed with respect to the workpiece image, based on the continuous edge.
As described above, in a conventional vision measuring machine, for automatic measurement, a measurement program including a measurement route is prepared for every workpiece to be measured, and executed. For measurement of a plurality of workpieces of an identical shape, such a measurement program is first prepared by manually measuring one workpiece and recording the measurement procedure, known from the manual measurement, and thereafter, while placing the remaining workpieces on the stage one by one, coordinate matching measurement (measurement reference position adjustment) is applied to the workpiece then on the stage, followed by execution of the measurement program prepared.
Note that coordinate matching measurement, which can be made manually, is usually made by executing a workpiece coordinate system measuring program (a Part Coordinate System, or PCS, program) while placing the workpiece one at a time on a position on the stage marked with tape or the like.
This, however, is troublesome and time consuming as each workpiece must be placed on a stage for measurement, and measuring programs must be exchanged for every type of workpieces when workpieces of a plurality of different types are to be measured.
In order to address the above problem, a plurality of workpieces may be collectively placed on the stage, and measured using a single measurement program. However, a single measurement program as currently in use is an integration of a plurality of measurement programs, each dedicated to a specific type of workpiece, such a program is thus inevitably lengthy and difficult to be composed. In addition, should any error be caused while measuring a plurality of workpieces, the measurement program must be amended, which may take time. Once the amended measurement program is resumed, workpieces measured before the-error in the measuring program must be measured again. Such repeated measurement is wasteful. Further, as the results of measurements of a plurality of workpieces obtained by repeatedly executing a single part program are stored in a single file (a result file), the result file must be edited every subsequent application of statistical processing to the measurement data. This may complicate statistical processing.
Also, as measurement of a plurality of workpieces on a stage may generally take time, unmanned, automatic measurement at night or during a holiday is highly desired. That is, it is highly desirable that measurement of workpieces on a stage be continued until completed, even when an error occurs during the measurement. Also desired is prompt post-measurement detection as to which workpieces on the stage are within tolerance, and which do not. It may often be desired that workpieces failing tolerance can be easily remeasured. As these demands can not be met by conventional measuring devices, demand for a device or method for readily and efficiently measuring numerous workpieces remains unsatiated.
SUMMARY OF THE INVENTION
The present invention has been conceived to overcome the above problems and aims to provide a device, method, and medium for efficiently measuring numerous workpieces through simple operation.
In order to achieve the above objects, according to the present invention, there is provided a vision measuring machine, comprising a stage for bearing measurement objects placed thereon, an imaging device for capturing an image of the measurement objects placed on the stage, and a processing device for measuring measurement object images in an image captured by the imaging device, wherein the processing device divides the stage into a plurality of sections to form a plurality of measurement sections each having a measurement object image, sets a measurement program to each of the plurality of measurement sections, and measures each of the measurement object images in the plurality of measurement sections based on a corresponding measurement program.
Also, according to the present invention, there is provided vision measuring machine, comprising an imaging device for capturing images of a plurality of measurement objects on a pallet segmented into a plurality of sections, and a processing device for measuring measurement object images in an image captured by the imaging device, wherein the processing device divides a measurement area into a plurality of sections to form a plurality of measurement sections, sets a measurement program to each of the plurality of measurement sections, and measures each of the measurement object images in the plurality of measurement sections based on a corresponding measurement program.
Here, preferably, the processing device determines whether or not measurement data on each of the plurality of measurement sections is within a predetermined tolerance, and outputs a GO/NG judgement for each of the plurality of measurement sections.
Also, preferably, the processing device outputs measurement data on each of the plurality of measurement sections.
Further, preferably, the processing device measures all other measurement sections in the plurality of sections even though measurement disorder should be caused to any measurement section.
Still further, preferably, the processing device measures only the measurement section selected in the plurality of sections.
Still further, the plurality of sections each have a desired shape, and are arranged in matrix. Preferably, each measurement section is a closed cell.
Also preferably, the processing device captures images of a plurality of measurement sections at the same time, and executes, simultaneously or sequentially, each measurement program set to each measurement section.
In addition, preferably, the processing device may preset a measuring program for each shape to be executed for every shape element. The processing device recognizes a shape element of a measurement object image in a measurement section, and selectively executes a suitable measurement program according to the results of recognition processing.
Further, preferably, the measurement program may be a program in which a numeric part thereof may be replaced by a variable as necessary.
The processing device may correct a measurement error.
The vision measuring machine of the present invention may further comprise positioning means for positioning a palette relative to the machine.
The vision measuring machine
Komatsu Koichi
Shimizu Masato
Carter Aaron
Mitutoyo Corporation
Oliff & Berridg,e PLC
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