Viscous fluid discharging apparatus for manufacturing semiconduc

Dispensing – With heating or cooling means – Heating only

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Details

22218906, 222190, 222527, 137171, 96155, B67D 506

Patent

active

059313498

ABSTRACT:
A viscous fluid discharging apparatus is provided for removing air bubbles introduced during the passing of the viscous fluid before being supplied to the substrate. A viscous fluid discharging apparatus according to the present invention includes a viscous fluid storing container, a viscous fluid supplying pump, a viscous fluid filter, and a viscous fluid discharging mechanism provided with a final air bubble filtering means. The fluid material discharging mechanism includes a connecting portion formed on an end of a temperature adjusting mechanism connected to an outlet of the fluid material supplying pump, and a discharging gun. The discharging gun has a sealed joining portion for being sealed and joined to the connecting portion, an air bubble capturing portion for capturing air bubbles from within the viscous fluid, and a viscous fluid path for moving the viscous fluid to an outlet in a sealed state.

REFERENCES:
patent: 2597699 (1952-05-01), Bauer
patent: 3476111 (1969-11-01), Matheson
patent: 3952765 (1976-04-01), Kimura
patent: 4388944 (1983-06-01), Honma et al.
patent: 4921147 (1990-05-01), Poirier

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