Vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl t

Details Vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl t Vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl t

1998-07-27

1999-07-27

Zitomer, Fred

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

430 75, 4302701, 4302851, 4302881, C08F 828, G03C 173

Patent

active

059291761

ABSTRACT:
A vinyl 4-tetrahydropyranyloxybenzal-vinyl 4-hydroxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer, a vinyl 4-tetrahydropyranyloxybenzal-vinyl tetrahydropyranyl ether-vinyl acetate copolymer and a preparation method thereof are provided. The copolymers have excellent transparency because they are very low in optical absorbance in the deep uv range. In addition, the acetal structure in the backbone and in the substituted groups endows the photoresist of the copolymer with superior dry etch resistance.

REFERENCES:
patent: 4115128 (1978-09-01), Kita
patent: 4491628 (1985-01-01), Ito

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