Video rate-enabling probes for atomic force microscopy

Details Video rate-enabling probes for atomic force microscopy Video rate-enabling probes for atomic force microscopy

2008-01-30

2011-11-22

Culbert, Roberts (Department: 1716)

Etching a substrate: processes

Forming or treating an article whose final configuration has...

C216S079000, C216S099000

Reexamination Certificate

active

08062535

ABSTRACT:
Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.

REFERENCES:
patent: 5021364 (1991-06-01), Akamine et al.
patent: 5264696 (1993-11-01), Toda
patent: 6198300 (2001-03-01), Doezema et al.
patent: 6274198 (2001-08-01), Dautartas
Burger et al., “High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through,” The 8thInternational Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, Jun. 25-29, 1995, pp. 573-576.

Affiliated with

Also associated with

Rating

Video rate-enabling probes for atomic force microscopy does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Video rate-enabling probes for atomic force microscopy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Video rate-enabling probes for atomic force microscopy will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4302378